SPUTTERING SYSTEMS

 

ATC ORION SERIES SPUTTERING SYSTEMS

● Range: $50,000 - $300,000
● Available with Load Lock or N2 Glove Box
● 10" - 14" Chamber Diameter
● Cluster Flange Options
● Compact, economical design
● HV & UHV Versions
● Configured for your application

 

ATC SERIES SPUTTERING SYSTEMS

● Range: $100,000 - $650,000+
● 13" - 34" Chamber Diameter
● HV & UHV Versions Available
● Load Lock Chamber & Cassette Options
● In-Situ Tilt Magnetrons
● Integrated Hoist or Hinged Chamber Lid
● Configured for your application

 

 

ATC-B SERIES BATCH COATING SYSTEMS

● Range: $70,000 - $650,000+
● Cylindrical and In-line chamber configurations
● Special magnetron sources for extended operations
● Custom substrate holders and fixturing

● DC, Pulsed DC and RF
● HV & UHV Versions
● Customized for your application

 
EVAPORATION SYSTEMS
 
ATC-E SERIES EVAPORATION SYSTEMS

● Range: $140,000 - $650,000+
● 13" - 34" Chamber Diameter
● HV & UHV Versions Available
● Load Lock Chamber & Cassette Options
● Rotary or Linear Sources
● Integrated Hoist or Hinged Chamber Lid
● Single, multi-layer or co-evaporation

● Configured for your application