RF GENERATORS & MATCHING NETWORKS for MAGNETRON SPUTTERING

RF Generators / Matching Networks
  • 100 W for RF bias and small sources
  • 300 W, 600 W and 1000W for RF magnetron deposition
  • Integral generator/matching network controller - minimal rack space
  • Software specifically for magnetron sputtering - intuitive operation
  • Programmable power limits 
  • Cables included with either "N", "HN" or "7/16 DIN" coaxial connectors

DC GENERATORS for MAGNETRON SPUTTERING

DCXS-4 DC Generators
  • 750 W and 1500 W
  • Integral 4 way switchbox inside
  • Intuitive interface specifically for magnetron sputtering
  • Programmable with power limits, ramping, timing and shutter control
A3DC Generators
  • (3) 600 W DC generators in one chassis
  • Economical supply for systems requiring many DC supplies
  • Interfaces with Labview Computer Control via I/O connection
  • Passive front panel display

PULSED DC GENERATORS for MAGNETRON SPUTTERING

AE Pulsed DC Generators
  • 1kW, 1.5kW and 5kW models
  • Stable at 1% of full power
  • 5kHz to 350 kHz variable in 5kHz increments
  • True asymmetric bipolar pulsed power 
  • 350V to 800V 

HIpiMS GENERATORS for ionized MAGNETRON SPUTTERING

HiPIMS Generators
  • 10 kW, 1 MW peak power
  • 1 kV, 1 kA, 1-500 Hz pulse frequency
  • 400 VAC 3 phase input, 50/60 Hz
  • RS-232, RS-485, analog interface
  • Active front panel control
  • DC unit, high power pulsar and cable matching unit