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AJA International Inc., 809 Country Way, N Scituate, MA  USA.
  • About AJA
  • Sputtering Systems
  • Ion Milling Systems
  • Evaporation Systems
  • Multi-Technique Systems
  • Sputtering Sources
  • Substrate Holders
  • Sputtering Power Supplies
  • Sputtering Targets & Evaporation Materials
  • Contact AJA
Tutorials.
TUTORIALS
What is sputtering What is ion milling What is thermal evaporation What is e-beam evaporation

AJA Sputtering Systems

AJA offers magnetron sputtering systems for research scale physical vapor deposition ranging from compact (ATC Orion Series) to complex (ATC Flagship Series) plus small batch coaters (ATC-B Series).  These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations.  Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H2O or LN2), tilting, or planetary motion. 

ATC ORION SERIES SPUTTERING SYSTEMS

ATC ORION SERIES COMPACT SPUTTERING SYSTEMS.
Compact Systems
  • Price range: $50,000 - $300,000
  • 10", 12" and 14" chamber Ø
  • HV and UHV versions
  • 1.5", 2" and 3" sputter sources
  • Substrate holders to 6" Ø
  • Load lock
  • Substrate cassettes 
  • Auto-loading
  • Computer control
  • Custom engineered versions 
  • Much more than a tabletop system
MORE DETAIL

ATC FLAGSHIP SERIES SPUTTERING SYSTEMS

ATC FLAGSHIP SERIES SPUTTERING SYSTEMS.
Flagship Systems
  • Price Range:  $100,000 - $950,000+
  • 18" to 34" chamber Ø
  • HV and UHV versions
  • 1" to 8" diameter sputter sources
  • In-situ tilt source option
  • Substrate holders to 8" Ø
  • Load locks
  • Substrate cassettes and masking 
  • Auto-loading
  • Computer control
  • Custom engineered versions 
MORE DETAIL

​ ATC-B SERIES BATCH COATING SYSTEMS

ATC-B SERIES BATCH COATING SYSTEMS.
Batch Coating Systems
  • Price range: $140,000 - $650,000+
  • Cylindrical or box style chambers  
  • Load-lock & cassette options  
  • Circular, triangular or linear sources
  • Integrated hoist or hinged door
  • Single, multi-layer or co-deposition 
  • Configured for your application
MORE DETAIL
About AJA/Contact Us
Sputtering Systems
Ion Milling Systems
Evaporation Systems
Multi-technique Systems
AJA LOGO
AJA INTERNATIONAL, Inc.
809 Country Way North Scituate, MA 02066
U.S.A.

Tel: +1-781-545-7365      Fax: +1-781-545-4105
email: TOPGUN@AJAINT.COM
Sputtering Sources
Substrate holders
Sputtering Power Supplies
Sputtering Targets & Evaporation Materials
Discounted/Excess Inventory

AJA International