Sputtering Systems

AJA offers magnetron sputtering systems for research scale physical vapor deposition ranging from compact (ATC Orion Series) to complex (ATC Flagship Series) plus small batch coaters (ATC-B Series).  These sputtering systems can be configured in either con-focal, normal incidence, off-axis, glancing angle, or combination of target to substrate orientations.  Substrate holder features include radiant heating (1000°C), azimuthal rotation, RF/DC biasing, z-motion, cooling (H2O or LN2), tilting, or planetary motion. 

ATC ORION SERIES SPUTTERING SYSTEMS

Compact Systems
  • Price range: $50,000 - $300,000
  • 10", 12" and 14" chamber Ø
  • HV and UHV versions
  • 1.5", 2" and 3" sputter sources
  • Substrate holders to 6" Ø
  • Load lock
  • Substrate cassettes 
  • Auto-loading
  • Computer control
  • Custom engineered versions 
  • Much more than a tabletop system
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ATC FLAGSHIP SERIES SPUTTERING SYSTEMS

Flagship Systems
  • Price Range:  $100,000 - $950,000+
  • 18" to 34" chamber Ø
  • HV and UHV versions
  • 1" to 8" diameter sputter sources
  • In-situ tilt source option
  • Substrate holders to 8" Ø
  • Load locks
  • Substrate cassettes and masking 
  • Auto-loading
  • Computer control
  • Custom engineered versions 
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​ ATC-B SERIES BATCH COATING SYSTEMS

Batch Coating Systems
  • Price range: $140,000 - $650,000+
  • Cylindrical or box style chambers  
  • Load-lock & cassette options  
  • Circular, triangular or linear sources
  • Integrated hoist or hinged door
  • Single, multi-layer or co-deposition 
  • Configured for your application
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