SUBSTRATE HOLDERS - HEATING

Substrate Holders - Heating
  • Quartz lamp or SiC
  • Substrate rotation and Z motion
  • Programmable tilting
  • RF/DC bias option
  • Full O2 compatibility
  • High efficiency 
  • Water cooled shielding
  • Substrate shutters (wedge, total)
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SUBSTRATE HOLDERS - COOLING

Substrate Holders - Cooling
  • H2O and LN2 
  • Substrate rotation and Z motion
  • RF/DC bias option
  • Backside He/N2/Ar gas cooling
  • Programmable tilting
  • Substrate shutters (wedge, total)
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SUBSTRATE HOLDERS - Specialty

Substrate Holders - Specialty
  • Transverse magnetic field versions
  • Programmable indexing spider 
  • Heating/cooling combinations
  • Combinatorial chemistry designs
  • Scanning/rastering carriers
  • Planetary designs for 3D parts coating
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