Configuration Overview

AJA International ATC-IM Ion Milling Systems are versatile tools which are built in a variety of configurations depending on the specific requirement. Chambers can be either cylindrical or box style and either HV or UHV. These systems can be configured for a broad range of applications ranging from nano pattern delineation to bulk wafer planarization. AJA incorporates either gridless or gridded, RF or DC ion sources, with appropriate grid materials and curvatures for the requirement. Systems have been manufactured to employ both inert and reactive/corrosive process gases with the appropriate safety gas box included on the equipment.