Mechanical Pumps
NeoDry G Series Dry Vacuum Pumps
Reliable, Quiet, and High-Performance Vacuum Technology
The NeoDry G Series from Kashiyama delivers clean, quiet, and reliable vacuum performance without the risks of oil contamination. With models ranging from 7G to 36G, these pumps are designed for thin film deposition, analytical instruments, semiconductor, and research applications where stable, oil-free vacuum is essential.
Key Features
Oil-Free Dry Design – no oil vapor, no backstreaming, and no particle generation
Quiet Operation – as low as ~45 dB(A) (typical, measured with inlet and gas ballast closed; ±3 dB(A))
Compact & Lightweight – small footprint and easy system integration
Wide Input Voltage – single-phase AC 100–240V with auto-switching between 100V and 200V
Low Maintenance – inspection interval approximately once every 6 years (clean/dry gas use)
Improved Water Vapor Handling – gas ballast improves condensable gas evacuation by up to 10% (except 36G)
Data/Control Ready – RS485 communication port for monitoring and speed control
Compliance Ready – meets European harmonic emission standards (CE/IEC)
Applications
Thin Film Deposition Systems – sputtering, evaporation, and CVD
Analytical Instruments – mass spectrometry, electron microscopy, residual gas analyzers
Semiconductor Manufacturing – clean, stable vacuum for process environments
R&D and Pilot Lines – reliable operation in academic and industrial labs