Deposition Properties of compounds

This compilation of material properties, sputtering parameters, and evaporation conditions is a useful quick reference when planning deposition work or analyzing results.

Of course we also supply sputtering targets and evaporation material.

Footnotes

  • (1): Wikipedia

  • (2): higher power in reactive deposition

  • (3): suggestions; verify before use

  • (4): Z-Ratio where known; otherwise determine experimentally