Deposition Properties of compounds

This compilation of material properties, sputtering parameters, and evaporation conditions is a useful quick reference when planning deposition work or analyzing results.

Of course we also supply sputtering targets and evaporation material.

Footnotes

  • Some density and melting point information: credit Wikipedia

  • For insulating targets, use power ramp up/down rates below 20 W/min

  • Maximum power density is higher in reactive deposition

  • Crucible liner suggestions are not an exhaustive list; verify before use

  • Z-Ratio given where known; otherwise determine experimentally