Target Lifetime Calculator

This simple-to-use estimator helps in planning deposition runs in thermal or e-beam evaporation. Besides approximating total thickness that can be deposited from a charge, thickness uniformity and utilization (amount of material that ends up on the substrate) are provided.

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Footnotes

  • Fill fraction assumes a solid fill

  • Calculations assume a cos(theta) distribution of evaporation plume

  • Thickness uniformity is based on an axially located source