OVERVIEW

Evaporation Systems

Configuration Details

AJA International ATC-E (E-Beam Evaporation) and ATC-T (Thermal Evaporation) Systems are highly evolved HV and UHV coating tools designed for R&D scale thin film deposition. These systems feature load-locks, ion milling / ion assist sources, heated/cooled substrate holders, QCM deposition control / computer control, and AJA's unique water cooled, 300 Amp thermal deposition sources.

ATC-E UHV Series

UHV E-Beam Evaporation Systems

  • Price range: $250,000 - $650,000+

  • Stainless Steel cylindrical chambers

  • Load-lock & cassette options

  • Linear e-beam sources

  • Integrated mechanical hoist

  • Cooled (H2O/LN2), heated, rotation and tilting substrate holders

ATC-2036 HV Series

HV E-Beam Evaporation Systems

  • Price range: $175,000 - $500,000+

  • Stainless steel box style chambers

  • Load-lock & cassette options

  • Rotary e-beam sources

  • Heavy-duty, double-hinged door

  • Cooled (H2O/LN2), heated, rotation, tilting and planetary substrate holders

ATC-T Series

Thermal Evaporation Systems

  • Price range: $100,000 - $450,000+

  • Box style or cylindrical chambers

  • HV and UHV options available

  • Load-lock & cassette options

  • Resistive boat, evaporation furnace and
    k-cell sources available

  • Cooled (H2O/LN2), heated, rotation and tilting substrate holders