OVERVIEW
Evaporation Systems
Configuration Details
AJA International ATC-E (E-Beam Evaporation) and ATC-T (Thermal Evaporation) Systems are highly evolved HV and UHV coating tools designed for R&D scale thin film deposition. These systems feature load-locks, ion milling / ion assist sources, heated/cooled substrate holders, QCM deposition control / computer control, and AJA's unique water cooled, 300 Amp thermal deposition sources.
ATC-E UHV Series
UHV E-Beam Evaporation Systems
Price range: $250,000 - $650,000+
Stainless Steel cylindrical chambers
Load-lock & cassette options
Linear e-beam sources
Integrated mechanical hoist
Cooled (H2O/LN2), heated, rotation and tilting substrate holders
ATC-2036 HV Series
HV E-Beam Evaporation Systems
Price range: $175,000 - $500,000+
Stainless steel box style chambers
Load-lock & cassette options
Rotary e-beam sources
Heavy-duty, double-hinged door
Cooled (H2O/LN2), heated, rotation, tilting and planetary substrate holders
ATC-T Series
Thermal Evaporation Systems
Price range: $100,000 - $450,000+
Box style or cylindrical chambers
HV and UHV options available
Load-lock & cassette options
Resistive boat, evaporation furnace and
k-cell sources availableCooled (H2O/LN2), heated, rotation and tilting substrate holders