Deposition Properties of the Elements

This compilation of material properties, sputtering parameters, and evaporation conditions is a useful quick reference when planning deposition work or analyzing results.

Of course we also supply sputtering targets and evaporation material.

Footnotes

  • Electrical conductivity values given for room temperature

  • Sputter yield estimates for 500 eV Argon

  • Power density estimates for unbonded 2” targets

  • Credit to TU Wien Vapor Pressure Calculator for some of the VP data

  • Crucible liner suggestions are not an exhaustive list